发明名称 Transistors having argon gate implants and methods of forming the same
摘要 Transistors are provided including first and second source/drain regions, a channel region and a gate stack having a first gate dielectric over a substrate, the first gate dielectric having a dielectric constant higher than a dielectric constant of silicon dioxide, and a metal material in contact with the first gate dielectric, the metal material being doped with an inert element. Integrated circuits including the transistors and methods of forming the transistors are also provided.
申请公布号 US8378430(B2) 申请公布日期 2013.02.19
申请号 US20100705111 申请日期 2010.02.12
申请人 MICRON TECHNOLOGY, INC.;SRIVIDYA CANCHEEPURAM V.;MATHEW SURAJ;GEALY DAN 发明人 SRIVIDYA CANCHEEPURAM V.;MATHEW SURAJ;GEALY DAN
分类号 H01L27/11;H01L21/8244 主分类号 H01L27/11
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