DIFFUSION FURNACE FOR MANUFACTURING SOLAR CELL

摘要

PURPOSE: A diffusion furnace for manufacturing a solar cell is provided to constantly maintain the inner pressure of the diffusion furnace by using gas vent pipes which have different diameters and are connected to the diffusion furnace. CONSTITUTION: A gas injector(113) is formed in one side of a tube and injects reaction gas. A gas exhaust port(150) is formed in the other side of the tube and discharges the reaction gas. A gas vent pipe(170) discharges the reaction gas generated from the diffusion furnace to the outside. The inner cross sectional area of the gas exhaust port gradually decreases from the end of the gas vent pipe to the outside.