发明名称 Method of fabricating semiconductor device
摘要 Disclosed is a method of fabricating a semiconductor device, including the steps of forming a diffusion preventing mask on a surface of a semiconductor substrate, applying a dopant diffusing agent containing a dopant of a first conductivity type or a second conductivity type onto the surface of the semiconductor substrate at a spacing from the diffusion preventing mask, and forming a dopant diffusion layer by diffusing the dopant from the dopant diffusing agent into the semiconductor substrate.
申请公布号 US8377809(B2) 申请公布日期 2013.02.19
申请号 US201013202861 申请日期 2010.02.24
申请人 SHARP KABUSHIKI KAISHA;KOHIRA MASATSUGU;FUNAKOSHI YASUSHI 发明人 KOHIRA MASATSUGU;FUNAKOSHI YASUSHI
分类号 H01L21/22 主分类号 H01L21/22
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