发明名称 |
Titania-doped quartz glass member and making method |
摘要 |
In a titania-doped quartz glass member having a surface where EUV light of up to 70 nm wavelength is reflected, a refractive index distribution in the surface has only one extreme point within a central 80% region of the member. The titania-doped quartz glass member has a surface with a high level of precision and thus can be formed into an EUV lithography photomask substrate which is improved in flatness and thermal expansion properties.
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申请公布号 |
US8377612(B2) |
申请公布日期 |
2013.02.19 |
申请号 |
US201213345936 |
申请日期 |
2012.01.09 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD.;MAIDA SHIGERU;OTSUKA HISATOSHI |
发明人 |
MAIDA SHIGERU;OTSUKA HISATOSHI |
分类号 |
G03F1/22;B32B9/00;C03B8/04;C03B20/00;C03C3/06;G03F1/24;G03F1/60 |
主分类号 |
G03F1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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