发明名称 |
Etchant for metal wiring and method for manufacturing metal wiring using the same |
摘要 |
Exemplary embodiments of the present invention provide a metal wiring etchant. A metal wiring etchant according to an exemplary embodiment of the present invention includes ammonium persulfate, an organic acid, an ammonium salt, a fluorine-containing compound, a glycol-based compound, and an azole-based compound.
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申请公布号 |
US8377325(B2) |
申请公布日期 |
2013.02.19 |
申请号 |
US201113032563 |
申请日期 |
2011.02.22 |
申请人 |
SAMSUNG DISPLAY CO., LTD.;SUH NAM-SEOK;HONG SUN-YOUNG;CHOUNG JONG-HYUN;KIM BONG-KYUN;PARK HONG-SICK;SONG JEAN-HO;LEE WANG-WOO;KIM DO-WON;KIM SANG-WOO;SEO WON-GUK;SHIN HYUN-CHEOL;LEE KI-BEOM;CHO SAM-YOUNG |
发明人 |
SUH NAM-SEOK;HONG SUN-YOUNG;CHOUNG JONG-HYUN;KIM BONG-KYUN;PARK HONG-SICK;SONG JEAN-HO;LEE WANG-WOO;KIM DO-WON;KIM SANG-WOO;SEO WON-GUK;SHIN HYUN-CHEOL;LEE KI-BEOM;CHO SAM-YOUNG |
分类号 |
B44C1/22;C03C15/00;C03C25/68;C23F1/00;C25F3/00 |
主分类号 |
B44C1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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