发明名称 |
Mold having nanometric features, method for realizing such a mold and corresponding use of it in a method for realizing an array of carbon nanotubes |
摘要 |
A mold is for obtaining, on a substrate, an array of carbon nanotubes with a high control of their positioning. The mold includes a first layer of a first preset material having a surface having in relief at least one first plurality of projections having a free end portion with a substantially pointed profile.
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申请公布号 |
US8377323(B2) |
申请公布日期 |
2013.02.19 |
申请号 |
US20090413688 |
申请日期 |
2009.03.30 |
申请人 |
STMICROELECTRONICS S.R.L.;VECCHIONE RAFFAELE;OCCHIPINTI LUIGI |
发明人 |
VECCHIONE RAFFAELE;OCCHIPINTI LUIGI |
分类号 |
C23F1/00 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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