发明名称 |
FERRO-ELECTRIC CAPACITOR MODULES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES |
摘要 |
<p>Ferro-electric capacitor modules, methods of manufacture and design structures. The method of manufacturing the ferro-electric capacitor includes forming a barrier layer on an insulator layer of a CMOS structure. The method further includes forming a top plate and a bottom plate over the barrier layer. The method further includes forming a ferro-electric material between the top plate and the bottom plate. The method further includes encapsulating the barrier layer, top plate, bottom plate and ferro-electric material with an encapsulating material. The method further includes forming contacts to the top plate and bottom plate, through the encapsulating material. At least the contact to the top plate and a contact to a diffusion of the CMOS structure are in electrical connection through a common wire.</p> |
申请公布号 |
KR20130017090(A) |
申请公布日期 |
2013.02.19 |
申请号 |
KR20127031000 |
申请日期 |
2011.06.23 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GAMBINO JEFFREY P.;MOON MATTHEW D.;MURPHY WILLIAM J.;NAKOS JAMES S.;PASTEL PAUL W.;PHILIPS BRETT A. |
分类号 |
H01L21/8247;H01L27/115 |
主分类号 |
H01L21/8247 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|