摘要 |
A vibrating electrode plate that senses a sound pressure faces a counter electrode plate to constitute a capacitance type acoustic sensor. In the counter electrode plate, acoustic perforations are opened in order to pass vibration, and plural projections are provided on a surface facing the vibrating electrode plate. An interval between the projections is decreased in a region where the vibrating electrode plate has high flexibility to easily generate local sticking with the counter electrode plate. The interval between the projections is increased in a region where the vibrating electrode plate has low flexibility to hardly generate local sticking with the counter electrode plate. The projections thus arranged prevent firm fixing of the vibrating electrode plate to the counter electrode plate and interruption of vibration of the vibrating electrode plate.
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