发明名称 APPARATUS OF ETCHING A GLASS SUBSTRATE
摘要 An apparatus for etching a glass substrate includes a vessel configured to contain an etchant; a first plate in the vessel and configured to receive a horizontally placed glass substrate thereon; and a circulating unit in the vessel facing the first plate and configured to create a flow of the etchant on a side of the first plate.
申请公布号 KR101233687(B1) 申请公布日期 2013.02.15
申请号 KR20100106208 申请日期 2010.10.28
申请人 发明人
分类号 C03C15/00;H01L21/302;H01L23/15 主分类号 C03C15/00
代理机构 代理人
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