| 摘要 |
PURPOSE: A thick-film pressure measuring sensor with a metal diaphragm and a method for manufacturing the same are provided to form an insulating film or a protective film or a sensing film on a diaphragm so that a high yield rate and low costs can be possible through mass production. CONSTITUTION: A method for a thick-film pressure measuring sensor with a metal diaphragm(1) is as follows. A metal diaphragm taking a role of a pressure receiving unit is formed in the upper part of a sensor by treating stainless steel. An electronic insulation film in which a ceramic paste is spread is formed in the upper part of the diaphragm. A pressure sensing film and a laser trimming unit are formed on the electronic insulation film. Electrode patterns are formed on the pressure sensing film. An upper protective film and an electrode unit are formed on the electrode patterns. |
