发明名称 DISPOSITIF DE FORMATION D'UN RESEAU D'INTERFERENCES SUR UN ECHANTILLON
摘要 A device for forming an interference grating on a sample. The device including a laser emitting a light beam of wavelength λ, a beam splitter plate splitting the light beam into first and second beams, the first beam being deflected in a first direction, a first stationary deflection mirror for deflecting the first beam onto a point P of the sample at a first constant angle of incidence &thetas;1, and at least one second stationary deflection mirror for deflecting the second beam along a final path that reaches point P of the sample at a second angle of incidence &thetas;2 in order to form an interference grating on the sample at a pitch that depends on the angular difference &thetas;. The device includes a movable deflection mirror to deflect the second beam from a plurality of first deflection points towards a plurality of second deflection points on the second mirror.
申请公布号 FR2970090(B1) 申请公布日期 2013.02.15
申请号 FR20110000014 申请日期 2011.01.04
申请人 CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE 发明人 LONGEAUD CHRISTOPHE
分类号 G02B27/10;G01R31/26;H01L31/042 主分类号 G02B27/10
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