Flexible CIGS thin film solar cells for the formation of the buffer layer Continuous deposition apparatus

摘要

PURPOSE: A continuous deposition apparatus for forming a buffer layer of a soft CIGS thin film solar cell is provided to prevent an absorber layer formation material to be evaporated on an opposite substrate by fixing a substrate for evaporation as a vertical state and regularly contacting the substrate with an evaporation liquid and water level. CONSTITUTION: An unwinding part(101) comprises an air shaft and a function of a clutch. A winding part(102) is driven with same driving condition as unwinding part. An evaporation part comprises an evaporation liquid discharge part and an evaporation liquid water level control device in inside. The evaporation liquid water level control device uniformly controls the level of evaporation liquid on a bath. A cleaning part(104) washes a substrate. A dryer part(105) dries the substrate in which wash is completed by using inert gas.