ANALYSIS DEVICE AND ANALYSIS METHOD BY SECONDARY IONS EMPLOYING ATOMIC PROBE

摘要

Provided are an analysis device and an analysis method by secondary ions employing an atomic probe with which it is possible to avoid charge-up without carrying out a preparatory process on a sample. This analysis device comprises: a neutral particle beam source for projecting a neutral particle beam (N) into a sample (41); an ion acceleration means for accelerating secondary ions which are discharged from the sample; and a measuring device which measures either the energy or the mass of the secondary ions which are discharged from the sample wherein the neutral particle beam is projected.