| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electromechanical conversion element capable of improving reliability as an element by extracting one of electrodes which sandwich a piezoelectric body without pulling out wiring alongside of an external surface of the piezoelectric body from a top face of the piezoelectric body. <P>SOLUTION: An electromechanical conversion element 1 comprises on a substrate 2: a piezoelectric body 8 composed of a thin film; two electrodes 7 and 9 which sandwich the piezoelectric body 8; a first electrode extraction layer 4 which is conductive with one electrode (for example, an upper electrode 9); and a second electrode extraction layer 10 which is conductive with the other electrode (for example, lower electrode 7). The first electrode extraction layer 4 is positioned nearer to the substrate 2 side than the piezoelectric body 8. The electrode 9 is coupled with the first electrode extraction layer 4 via a coupling part 21 which penetrates through the piezoelectric body 8 in a direction perpendicular to the substrate 2. <P>COPYRIGHT: (C)2013,JPO&INPIT |
