| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processing device which improves usability of an operation screen and reduces inconvenience of input. <P>SOLUTION: For inputting a numeric value for device control by using an operation panel comprising a touch panel, if a numeric value previously input to an edit box can be still utilized, the numeric parameter for the device control can be copied by dragging and dropping the edit box to a target edit box. Thus, it is possible to improve usability and also prevent erroneous input. <P>COPYRIGHT: (C)2013,JPO&INPIT |
