发明名称 METHOD OF CUTTING WORKPIECE
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of cutting a workpiece which can suppress occurrence of a burr protruded upward from a machined surface. <P>SOLUTION: A method of cutting a workpiece is for cutting the workpiece having a ductile material layer on at least a surface thereof, from a surface side of the workpiece by a cutting blade. The method of cutting the workpiece comprises: a surface covering step of covering the surface of the workpiece with a protective member; a cutting step of cutting the workpiece together with the protective member from the surface side of the workpiece by the cutting blade after the surface covering step is carried out; and a removal step of removing the protective member from the surface of the workpiece after the cutting step is carried out. The occurrence of burr in the ductile material layer is suppressed by covering the surface of the workpiece with the protective member. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013033801(A) 申请公布日期 2013.02.14
申请号 JP20110168288 申请日期 2011.08.01
申请人 DISCO ABRASIVE SYST LTD 发明人 ARAI YUKA;SUGIYAMA TOMOAKI
分类号 H01L21/301 主分类号 H01L21/301
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