METHOD OF DRIVING MOVABLE BODY, SYSTEM OF DRIVING MOVABLE BODY, PATTERN FORMATION METHOD AND DEVICE, EXPOSURE METHOD AND DEVICE, DEVICE MANUFACTURING METHOD, MEASUREMENT METHOD, AND POSITION MEASUREMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To stably and highly accurately drive a movable body by measuring an installation position of a surface position sensor and measuring position coordinates in a vertical direction and an inclination direction of a two-dimensional movement surface of the movable body using the surface position sensor on the basis of the measured installation position.

SOLUTION: A wafer stage WST is moved while an XY position of the wafer stage WST is monitored using an interferometer system, and an XY installation position of a surface position sensor is measured by scanning Y scales 39Y3and 39Y4in X-axis direction and Y-axis direction using the surface position sensor 72k, 74i, 76j. The wafer stages is stably and highly accurately driven by measuring position coordinates of the wafer stage against an XY plane (a movement surface) in a vertical direction and an inclination direction using the surface position sensor on the basis of obtained installation position information.

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