发明名称 SEMICONDUCTOR LIGHT-EMITTING ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor element which inhibits detachment of an insulation film covering a surface of an extension part provided at a metal electrode. <P>SOLUTION: A semiconductor light-emitting element comprises: an n-type or p-type semiconductor layer laminated on an active layer composed of a semiconductor; a metal electrode arranged on the semiconductor layer and having a connection part and an extension part; and an insulation film covering at least a top face and a lateral face of the extension part of the metal electrode. The extension part is formed by metal multilayer films. The metal multilayer films include at least two layers of first metal layers, and second metal layers laminated alternately with the first metal layers. The uppermost layer of the metal multilayer films is one of the second metal layers and each end face of the second metal layers included in the metal multilayer films other than the uppermost second metal layer is exposed on the lateral face of the extension part and contacts the insulation film. A second metal material composing the second metal layer has conductivity lower than that of a first metal material composing the first metal layer but the second metal material is more excellent in an adhesion strength with the insulation film than the first metal material. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013033869(A) 申请公布日期 2013.02.14
申请号 JP20110169583 申请日期 2011.08.02
申请人 MITSUBISHI CHEMICALS CORP 发明人 HIRAOKA SUSUMU
分类号 H01L33/40;H01L21/28;H01L21/3205;H01L21/768;H01L23/532 主分类号 H01L33/40
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