发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 According to one embodiment, a semiconductor device includes a substrate, a gate electrode, a channel region, a source region and a drain region. The source region forms a first boundary with the channel region, and the drain region forms a second boundary with the channel region. A side of the gate electrode at the side of the source region has a plurality of convex portions extending along a gate length direction, a side of the gate electrode at the side of the drain region is parallel to a gate width direction, the first boundary and the second boundary have shapes corresponding to the side of the gate electrode at the side of the source region and the side of the gate electrode at the side of the drain region, and the length of the first boundary is more than the length of the second boundary.
申请公布号 US2013037867(A1) 申请公布日期 2013.02.14
申请号 US201213403302 申请日期 2012.02.23
申请人 KABUSHIKI KAISHA TOSHIBA;ADACHI KANNA 发明人 ADACHI KANNA
分类号 H01L29/772;H01L21/336 主分类号 H01L29/772
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