FILM WORKING METHOD

摘要

Provided is a film working method which is carried out at low energy, and which has superior work precision and work quality. A film working method removes a site to be removed on a film which is formed upon one face of a substrate by projecting a laser beam, forming a removed area. The laser beam projection projects two or more shots of a laser beam from a pulse laser light source. The first shot of the laser beam has an energy density which removes between 50% or more and less than 100% of the site to be removed in a perpendicular direction of the plane of the film. Each of the second and successive shots of the laser beam has 50%-100% of the energy density which the first shot of the laser beam has. The interval between shots of the laser beam is one second or more.