| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light interference modulator display comprising a light interference MEMS display element. <P>SOLUTION: A MEMS device is electrically actuated with voltage applied between a first electrode 702 and moveable material 714. The device may be maintained in an actuated state by latch electrodes 730a, 730b which are separate from the first electrode. <P>COPYRIGHT: (C)2013,JPO&INPIT |
