| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the replacement efficiency of a gas in a casing housing an ultraviolet lamp and thereby shortening the gas replacement time and reducing the usage of the gas in the replacement. <P>SOLUTION: An ultraviolet light radiation apparatus comprises: an ultraviolet lamp 2 radiating ultraviolet light to a workpiece W; a casing 3 housing the ultraviolet lamp 2 and having an opening 31 that opens with facing the workpiece W; and a gas supply mechanism 4 supplying a gas to the interior of the casing 3. A circulation guide surface 3x used for circulating the gas that is supplied by the gas supply mechanism 4 around the ultraviolet lamp 2 in one direction is provided on an inner surface or an internal space of the casing 3. <P>COPYRIGHT: (C)2013,JPO&INPIT |
