VAPOR PHASE GROWTH DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a vapor phase growth device which prevents a heat decomposition product from adhering on a view port inner surface and enables optical monitor and measurement of a substrate to be reliably conducted from a view port.

SOLUTION: A vapor phase growth device heats a substrate 12 installed in a reactor 11 covered by a sealing plate 15 to a preset temperature and supplies a material gas to the reactor to form a thin film on a substrate surface. In the vapor growth device, a cylindrical member 21 is disposed between a view port 16 provided at the reactor exterior side of the sealing plate and a through hole 23 provided at the sealing plate and the interior of the cylindrical member is used as an optical path for passing measuring beam of an optical measuring apparatus 20 which monitors and measures the substrate surface.

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