发明名称 |
Systems and Methods for Sealing in Site-Isolated Reactors |
摘要 |
Substrate processing systems and methods are described for site-isolated processing of substrates. The processing systems include numerous site-isolated reactors (SIRs). The processing systems include a reactor block having a cell array that includes numerous SIRs. A sleeve is coupled to an interior of each of the SIRs. The sleeve includes a compliance device configured to dynamically control a vertical position of the sleeve in the SIR. A sealing system is configured to provide a seal between a region of a substrate and the interior of each of the SIRs. The processing system can include numerous modules that comprise one or more site-isolated reactors (SIRs) configured for one or more of molecular self-assembly and combinatorial processing of substrates.
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申请公布号 |
US2013039813(A1) |
申请公布日期 |
2013.02.14 |
申请号 |
US201213657006 |
申请日期 |
2012.10.22 |
申请人 |
INTERMOLECULAR, INC.;INTERMOLECULAR, INC. |
发明人 |
FRANCIS AARON T.;WEINER KURT H. |
分类号 |
B01J19/24 |
主分类号 |
B01J19/24 |
代理机构 |
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代理人 |
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地址 |
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