| 摘要 |
PURPOSE: A target module processing system is provided to only mount a transfer module on a region corresponding to an operation radius of a vacuum robot, thereby maximizing space utilization. CONSTITUTION: An auxiliary transfer device(300) transfers a target module to a transfer module(200) for processing the target module and receives a processed target module. A plurality of cassettes(400) transfers the target module to the auxiliary transfer device and receives the processed target module. The cassette is divided in order to separate the processed target modules from the target modules. |
