发明名称 THIN FILM TRANSISTOR DISPLAY PANEL AND MANUFACTURING METHOD OF THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a thin film transistor display panel which can improve characteristics of a thin film transistor using an oxide semiconductor, and a manufacturing method of the same. <P>SOLUTION: A thin film transistor display panel according to an embodiment of the present invention comprises: a gate wiring layer arranged on a substrate; an oxide semiconductor layer arranged on the gate wiring layer; and a data wiring layer arranged on the oxide semiconductor layer and crossing the gate wiring layer. The data wiring layer includes a main wiring layer containing copper and a capping layer containing a copper alloy and arranged on the main wiring layer. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013033927(A) 申请公布日期 2013.02.14
申请号 JP20120105272 申请日期 2012.05.02
申请人 SAMSUNG ELECTRONICS CO LTD 发明人 KIM DO-HYUN;KHANG YOON-HO;LEE DONG HOON;PARK SANG-HO;YU SE-HWAN;KIM CHEOL-KYU;YI YONG SU;CHO SEIKO;CHANG CHONG SUP;KIM DONG JO;YI JEONG-GYU
分类号 H01L29/786;G02F1/1368;G09F9/00;G09F9/30;H01L21/28;H01L21/3205;H01L21/336;H01L21/768;H01L23/532;H01L29/417 主分类号 H01L29/786
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