| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a creepage surface discharge type plasma jet generation apparatus which efficiently generates plasma jet formed by lower temperature plasma, with a simple structure. <P>SOLUTION: In a cylinder type creepage surface discharge element 2 where a filamentous discharge electrode 3 is provided on an inner surface of a cylindrical alumina ceramic 4 and a planar induction electrode 5 is provided at an inside or an outer surface of the alumina ceramic 4, a gas is supplied from one end surface (a gas inflow port 1) and is blown out from the other end surface (a blow out port 6) and a high frequency high voltage is applied between the discharge electrode 3 and the induction electrode 5 to cause creepage surface discharge and generate plasma (creepage surface discharge excited plasma). Consequently, plasma jet is blown out from the blow out port 6. <P>COPYRIGHT: (C)2013,JPO&INPIT |
