FREQUENCY ADJUSTING METHOD OF VIBRATING DEVICE, VIBRATING DEVICE AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a frequency adjusting method of a piezoelectric device in which there is no possibility that disconnection occurs during a frequency adjustment even when employing a piezoelectric vibrating piece having an extraction electrode at a stepped portion.

SOLUTION: A frequency adjusting method comprises the steps of: providing a stepped portion 23 between a vibrating portion 24 on which an excitation electrode 26 is formed and a peripheral edge portion 22 on which an input-output electrode 30 is formed; forming an extraction electrode 28 for electrically connecting the excitation electrode 26 and the input-output electrode 30 across the stepped portion 23; mounting a piezoelectric vibrating piece 20 on a package base 36; and subsequently etching the excitation electrode 26 in the piezoelectric vibrating piece 20 having thickness shear vibration as main vibration. Out of curve lines along a contour shape of an energy confinement region formed in an elliptical shape at the vibrating portion 24, at least the excitation electrode 26 positioned at an energy confinement region side from a tangent line set with respect to a portion closest to a portion to which the extraction electrode 28 is connected in a peripheral edge of the excitation electrode 26 is etched as an etching region.

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