发明名称 Method of Multi-Chip Wafer Level Packaging
摘要 A method of multi-chip wafer level packaging comprises forming a reconfigured wafer using a plurality of photo-sensitive material layers. A plurality of semiconductor chips and wafers are embedded in the photo-sensitive material layers. Furthermore, a variety of through assembly vias are formed in the photo-sensitive material layers. Each semiconductor chip embedded in the photo-sensitive material layers is connected to input/output pads through connection paths formed by the through assembly vias.
申请公布号 US2013040423(A1) 申请公布日期 2013.02.14
申请号 US201113206602 申请日期 2011.08.10
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.;TUNG CHIH-HANG;YU CHUN HUI;YU CHEN-HUA;SHIH DA-YUAN 发明人 TUNG CHIH-HANG;YU CHUN HUI;YU CHEN-HUA;SHIH DA-YUAN
分类号 H01L21/56;H01L21/82 主分类号 H01L21/56
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