发明名称 OPTICAL FILTER AND OPTICAL MODULE PROVIDED WITH SAME
摘要 An optical filter includes first and second substrates, first and second mirrors, and first and second electrodes. The second substrate faces the first substrate. The second substrate includes a first surface and a second surface. The second surface surrounds the first surface in a plan view and a second height of the second surface is lower than a first height of the first surface. The first mirror is formed on the first surface of the second substrate. The second mirror is formed on the first substrate, the second mirror facing the first mirror. The first electrode is formed on the first substrate. The second electrode is formed on the second surface of the second substrate. The second electrode faces the first electrode.
申请公布号 US2013037703(A1) 申请公布日期 2013.02.14
申请号 US201213655963 申请日期 2012.10.19
申请人 SEIKO EPSON CORPORATION;SEIKO EPSON CORPORATION 发明人 FUNASAKA TSUKASA
分类号 G02B26/00;G01J3/51 主分类号 G02B26/00
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