发明名称 |
SEMICONDUCTOR DEVICE AND PROGRAMMING METHOD THEREOF |
摘要 |
A semiconductor device and a method for programming the same are provided. The semiconductor device comprises: a semiconductor substrate with an interconnect formed therein; a Through-Silicon Via (TSV) penetrating through the semiconductor substrate; and a programmable device which can be switched between on and off states, the TSV being connected to the interconnect by the programmable device. The present invention is beneficial in improving flexibility of TSV application.
|
申请公布号 |
US2013037859(A1) |
申请公布日期 |
2013.02.14 |
申请号 |
US201113321852 |
申请日期 |
2011.08.12 |
申请人 |
ZHONG HUICAI;LIANG QINGQING;ZHAO CHAO;ZHU HUILONG |
发明人 |
ZHONG HUICAI;LIANG QINGQING;ZHAO CHAO;ZHU HUILONG |
分类号 |
H01L27/10;H01L21/326;H01L23/522;H01L23/525;H01L29/788;H01L29/92 |
主分类号 |
H01L27/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|