| 摘要 |
<p>A liquid processing device is equipped with: a substrate-holding part (21) that holds a substrate (W) horizontally and rotates the substrate; processing liquid nozzles (82) that supply a processing liquid with respect to the substrate being held by the substrate-holding part; a cup (40) that is provided outside of the peripheral edge of the substrate held by the substrate-holding part, and that receives the processing liquid after it has been supplied to the substrate by the processing liquid nozzles; a top plate (32) that covers from above the substrate held by the substrate-holding part; a top plate rotational drive mechanism that rotates the top plate; and a liquid-receiving member (130) having an annular liquid-receiving space (132) which encloses the peripheral edge of the top plate.</p> |
