发明名称 STAGE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting or evaluating a semiconductor, while reducing effect of a magnetic field on an electron beam. <P>SOLUTION: A base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. X-motor stators 110a, 110b, X-motor movers 111a, 111b, Y-motor stators 112a, 112b, and Y-motor movers 113a, 113b of linear motors are disposed on four sides of the base 104 to be distanced from an electron beam projection position at the center of a stage device. The X-motor stators 110a and the Y-motor stators 112b are configured to have a C-shaped structure whose opening faces outside of the device. Further, a movable X-table 102 is coupled to the top table 101 and to a Y-table 103 via linear guides 107, 109 made of a nonmagnetic material or roller mechanisms made of a nonmagnetic material. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013033748(A) 申请公布日期 2013.02.14
申请号 JP20120222405 申请日期 2012.10.04
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 OGAWA HIRONORI;KOYAMA MASAHIRO;SHIBATA NOBUO;MATSUSHIMA MASARU;NAKAGAWA SHUICHI;KONUKI KATSUNORI;FUKUSHIMA YOSHIMASA
分类号 H01J37/20 主分类号 H01J37/20
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