| 摘要 |
A semiconductor device includes a stripe-shaped gate trench formed in one major surface of n-type drift layer, a gate trench including gate polysilicon formed therein, and a gate polysilicon connected to a gate electrode. A p-type base layer is formed selectively in mesa region between adjacent gate trenches and a p-type base layer including an n-type emitter layer and connected to emitter electrode. One or more dummy trenches are formed between p-type base layers adjoining to each other in the extending direction of gate trenches. An electrically conductive dummy polysilicon is formed on an inner side wall of dummy trench with a gate oxide film interposed between the dummy polysilicon and dummy trench. The dummy polysilicon is spaced apart from the gate polysilicon and may be connected to the emitter electrode.
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