| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light irradiation device capable of increasing light amount of light emitted from a light source and irradiating an object to be irradiated. <P>SOLUTION: An ultraviolet irradiation device irradiates a laminated substrate W as an object to be irradiated arranged below a shade mask M with ultraviolet ray UV emitted from a lamp 40 as an ultraviolet ray source (a light source), and transmitted through the shade mask M arranged below the lamp 40. The ultraviolet irradiation device comprises suction tubes 30 suspended and supported by holder members 24 as support members arranged above the shade mask M, having optical transparency, and sucking and holding the shade mask M by vacuum suction. <P>COPYRIGHT: (C)2013,JPO&INPIT |
