发明名称 MANUFACTURING METHOD USING MULTI-STEP ADHESIVE CURING FOR SEALED SEMICONDUCTOR DEVICE
摘要 A method for forming a sealing body without cracks in manufacture of a semiconductor device having an external terminal formed through the use of an electrolysis plating method. A front surface of a semiconductor wafer is placed over a front surface of a first support heated to a first temperature. An adhesive sheet is then bonded to a back surface of the semiconductor wafer, after which the semiconductor wafer is subjected to heat treatment at a second temperature higher than the first temperature. After the semiconductor wafer and the adhesive sheet are cut along cutting regions, a plurality of semiconductor chips each having an adhesive patch bonded thereto are obtained. A mother substrate is placed over a front surface of a second support heated to a third temperature and the semiconductor chips are fixed to an upper surface of the mother substrate via the adhesive patch.
申请公布号 US2013040426(A1) 申请公布日期 2013.02.14
申请号 US201213559397 申请日期 2012.07.26
申请人 RENESAS ELECTRONICS CORPORATION;NARITA HIROAKI 发明人 NARITA HIROAKI
分类号 H01L21/78 主分类号 H01L21/78
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