Cylindrical micro valve manufacturing method, involves inserting plates above each other in holding device, isolating micro valves by punching, and punching out membrane from membrane support plate during connecting components

摘要

The method involves providing support plates (10, 14, 16, 18) and a membrane support plate (12) with identical components in a same spacing. The plates are inserted above each other in a holding device (100). One of the components is connected to an outer edge (48), which limits the components, by a joining process i.e. ultrasonic welding process. Micro valves (24, 26) are isolated by punching. A membrane (34) is punched out from the membrane support plate during connecting the components. A section of an actuator (38) e.g. micro coil, is extended through a housing part (30) i.e. guide plate. The support plates are made of plastic.