| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus which can easily discriminate the angle and the energy of SEs and BSEs and convert necessary information of a sample to be observed into an image. <P>SOLUTION: A scanning charged particle beam apparatus comprises: a charged particle source that emits a primary charged particle beam; converging lenses that converges the primary charged particle beam on a sample; a detector that detects secondary charged particles emitted from the irradiation point on the sample; a waveform processing unit which performs waveform processing to signals transmitted from the detector, and generates energy distribution information of the secondary charged particles; and a control unit which selects, from the energy distribution information, information within a discretionary energy range, and displays an image on a display unit. <P>COPYRIGHT: (C)2013,JPO&INPIT |
