LIQUID IMMERSION MEMBER, METHOD FOR MANUFACTURING LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

摘要

A liquid immersion member holds liquid between the liquid immersion member and an object such that an optical path of exposure light applied to the object is filled with the liquid, thereby forming a liquid immersion space. In the liquid immersion member, an amorphous carbon film is formed on at least a part of a region coming into contact with the liquid.