| 发明名称 |
Gradient-assisted image resampling for microlithography |
| 摘要 |
<p>The present disclosure relates to the re-sampling of pixel data, with one application being micro-lithography. In particular, it relates to the extraction of modulator pixels from a rasterized image, as a function of how the modulator moves across the rasterized image.</p> |
| 申请公布号 |
EP2359192(B1) |
申请公布日期 |
2013.02.13 |
| 申请号 |
EP20090796348 |
申请日期 |
2009.12.04 |
| 申请人 |
MICRONIC MYDATA AB |
发明人 |
IVANSEN, LARS;OESTERBERG, ANDERS |
| 分类号 |
G03F7/20;G02B26/08;G06T9/20 |
主分类号 |
G03F7/20 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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