发明名称 DEPOSITION SOURCE, APPARATUS FOR ORGANIC LAYER DEPOSITION AND METHOD FOR MANUFACTURING OF ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME
摘要 <p>PURPOSE: A deposition source assembly, an organic layer depositing apparatus, and a method for manufacturing an organic light emitting display device using the same are provided to improve doping uniformity by uniformly spraying dopant materials and host materials to a preset area through a first deposition source and a second deposition source which are vertically arranged. CONSTITUTION: A deposition source(110) includes a first deposition source(110a) and a second deposition source(110b). The first deposition source includes host materials(115a) as deposition materials. The second deposition source includes dopant materials(115b) as deposition materials. A second deposition source nozzle unit includes a plurality of second deposition source nozzles(121b) formed on the second deposition source. A first deposition source nozzle unit includes a first deposition source nozzle(121a) penetrating from the first deposition source to the second deposition source.</p>
申请公布号 KR20130015144(A) 申请公布日期 2013.02.13
申请号 KR20110076990 申请日期 2011.08.02
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 SUNG, UN CHEOL;KIM, MU HYUN
分类号 H01L51/56;C23C14/00 主分类号 H01L51/56
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