| 摘要 |
PURPOSE: A piezoelectric actuation stage based on an elastic hinge with a multilayer structure is provided with a simplified structure as the input unit of a motion guide mechanism is connected to the output unit of a displacement expansion mechanism. CONSTITUTION: A housing(120) comprises an inner space. A cover(110) is connected to the housing. A piezoelectric element(150) generated driving force by electric energy. A driving housing(130) is supplied with the driving power from the piezoelectric element. A displacement measuring unit(160) detects the position of a movable target unit(141). |
