MICRO VALVE WITH ELASTIC DEFORMABLE SEAL LIP, METHOD OF PRODUCING AND MICRROPUMP

摘要

The present invention relates to a micro-valve which is formed from two firmly connected substrates and preferably has an actuator element, for example that is diaphragm-driven, for the controlled opening and closing of a first and/or second passage. The invention further relates to a method for producing such a micro-valve and to a micro-pump which uses at least one such micro-valve. Said micro-pump is intended to be used in particular in conjunction with the development of an artificial sphincter. The micro-valve has a first substrate and a second substrate which are non-detachably joined to each other in order to form a controllable fluid flow section, and at least one first passage and at least one second passage. According to the invention, the micro-valve has at least one elastically deformable seal structure which, for example, can be formed by a photostructurable silicone, to seal off the first and/or second passage.