| 摘要 |
PURPOSE: A method for inspecting an indentation of a conductive ball using a differential interference contrast microscope is provided to perform an auto focusing and inspection by using one inspecting camera without a separate focusing camera because the member of a processing screen per second is increased by reducing a region of interest. CONSTITUTION: A method for inspecting an indentation of a conductive ball using a differential interference contrast microscope is as follows. An auto focusing and inspection function are performed by using one inspection camera(100). When performing the auto focusing, the region of interest is reduced as a specific region not a full size of a test object so that a high speed auto focusing is performed. When performing the inspection, the region of interest is controlled in a software way, thereby being photographed by enlarging into a whole area of the inspection area. |
