发明名称 Computer generated hologram including plural isotropic and anisotropic cells for forming combined intensity distribution, generation method, and exposure apparatus
摘要 A computer generated hologram which forms a light intensity distribution on a predetermined plane by giving a phase distribution to a wavefront of incident light, the hologram comprising a plurality of anisotropic cells each including an anisotropic medium configured to change a polarization state of the incident light, and a plurality of isotropic cells each including an isotropic medium configured not to change a polarization state of the incident light, wherein a linearly polarized light component, in a first direction, of the incident light forms a first light intensity distribution on the predetermined plane, and a linearly polarized light component, in a second direction perpendicular to the first direction, of the incident light forms a second light intensity distribution different from the first light intensity distribution on the predetermined plane.
申请公布号 US8373914(B2) 申请公布日期 2013.02.12
申请号 US20080681895 申请日期 2008.12.08
申请人 CANON KABUSHIKI KAISHA;MATSUBARA ISAO 发明人 MATSUBARA ISAO
分类号 G03H1/08 主分类号 G03H1/08
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