发明名称 |
Apparatus and method for investigating a sample |
摘要 |
An apparatus for investigating a sample comprising: a source of beam radiation; a detector for detecting a beam of radiation reflected by the sample and an optical subsystem for manipulating the beam between source and detector wherein the optical subsystem comprises a first optical element arranged in use to angularly deflect the source beam within a given solid angle and a second optical element arranged to focus the beam from the first optical element onto a substantially flat image plane and wherein radiation reflected by the sample passes back through the first and second optical elements to the detector.
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申请公布号 |
US8373126(B2) |
申请公布日期 |
2013.02.12 |
申请号 |
US20100835409 |
申请日期 |
2010.07.13 |
申请人 |
TERAVIEW LIMITED;CLUFF JULIAN A. |
发明人 |
CLUFF JULIAN A. |
分类号 |
G01N21/35;G01J1/42;G02B26/08;G02B26/10 |
主分类号 |
G01N21/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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