发明名称 Structuring substrate that is useful for photonic crystals, by depositing optical convergent elements, transverse to light beam, on surface of substrate, and applying beam on substrate to form cavity, where the elements have dimensions
摘要 The process comprises depositing optical convergent elements (16), transverse to a light beam (14), on a surface (2A) of a substrate (2), and applying the light beam on a portion of the substrate so as to form a cavity. The optical convergent elements have dimensions (10 nm to 100 mu m) that are less than a width of the light beam such that the light beam is applied on the substrate through the convergent elements, spherical shaped particles and cylindrical shaped sticks whose side walls are disposed against the surface of the substrate intended to be placed opposite to the light beam. The process comprises depositing optical convergent elements (16), transverse to a light beam (14), on a surface (2A) of a substrate (2), and applying the light beam on a portion of the substrate so as to form a cavity. The optical convergent elements: have dimensions (10 nm to 100 mu m) that are less than a width of the light beam such that the light beam is applied on the substrate through the convergent elements, spherical shaped particles and cylindrical shaped sticks whose side walls are disposed against the surface of the substrate intended to be placed opposite to the light beam; are disposed in a single layer; are disposed between the substrate and a support partially transparent to the wavelength of the light beam; and are removed by the light beam. The light beam is produced by a laser, and scans the substrate at the portion of the substrate covered by the optical convergent elements. The method further comprises interposing a converging lens between the laser and the optical convergent elements. An independent claim is included for a device for structuring a substrate.
申请公布号 FR2978688(A1) 申请公布日期 2013.02.08
申请号 FR20110002426 申请日期 2011.08.02
申请人 CENTRE NATIONAL DE LA RECHERCHE;NATIONAL CENTRAL UNIVERSITY;UNIVERSITE PARIS 13 发明人 FISCHER ALEXIS;CHEN CHII CHANG;CHAN CHIA HUA;BOUDRIOUA AZZEDINE;COENS ANTHONY
分类号 B23K26/073;G02B5/18 主分类号 B23K26/073
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