| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent deterioration of a microreactor due to ultraviolet light by making permeate a light with shorter wavelength than heretofore. <P>SOLUTION: The microreactor is equipped with a first plate which comprises quartz and has a flow path formed by a prescribed pattern, a second plate which comprises quartz and is joined to the first plate, and joining materials provided with thickness of ≤1 nm on the plane on which the flow path of the first plate is formed and on the plane facing the flow path of the second plate. Both joining materials provided on the first and second plates are joined by an atomic diffusion bonding method. <P>COPYRIGHT: (C)2013,JPO&INPIT |
