RECIPE GENERATING DEVICE, INSPECTION ASSISTING DEVICE, INSPECTION SYSTEM, AND RECORDING MEDIUM

摘要

Information recorded in a design layout is analyzed directly, the desired area is extracted, and this extraction method is used to generate an inspection recipe and to accomplish inspection in an efficient manner. Hierarchical information in the design layout data is analyzed, the frequency of reference within the design layout data is calculated for each of the cells that constitute the internal data, the cells are rearranged in order of greatest frequency of reference, a target is searched, and a high-ranking cell threof is tracked, whereby the area extraction of the desired circuit module, such as a memory mat, is facilitated.