发明名称 |
METHOD FOR REMOVING OXYGEN FROM ALUMINUM NITRIDE BY CARBON |
摘要 |
Disclosed is a method for removing oxygen from aluminum nitride by carbon. At first, an oven is provided. An aluminum nitride substrate is located in the oven. Nitrogen is introduced into the oven to form an atmosphere of nitrogen. The temperature is increased to the transformation point of the aluminum nitride substrate in the oven. Then, the heating is stopped and quenching is conducted in the oven. Carbon is introduced into the oven in the quenching. Thus, oxygen included in the aluminum nitride substrate reacts with the carbon to produce carbon monoxide or carbon dioxide. The carbon monoxide or carbon is released from the oven as well as the nitrogen. Thus, the aluminum nitride substrate is purified. |
申请公布号 |
US2013034488(A1) |
申请公布日期 |
2013.02.07 |
申请号 |
US201113237076 |
申请日期 |
2011.09.20 |
申请人 |
CHUNG-SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY ARMAMENTS, BUREAU, MINISTRY OF NATIONAL DEFENSE;KUO YANG-KUAO;HSIANG CHIA-YI;CHIANGLIN CHING-HUI;LIU TE-PO |
发明人 |
KUO YANG-KUAO;HSIANG CHIA-YI;CHIANGLIN CHING-HUI;LIU TE-PO |
分类号 |
C01B21/072 |
主分类号 |
C01B21/072 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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